標題: | Micro actuated grating for multi-beam optical pickups |
作者: | Lee, Chi-Hung Chiu, Yi Shieh, Han-Ping D. 電控工程研究所 光電工程學系 Institute of Electrical and Control Engineering Department of Photonics |
公開日期: | 19-二月-2007 |
摘要: | A stress-induced curved polysilicon actuator with a grating is achieved for the application of recordable optical pickups, which have been realized on a single silicon chip using a two-layer poly-silicon and one-layer silicon nitride micro-machining process. Three diffracted beams with equal intensity in each order from the grating were generated while applying a voltage to the actuator. The switching between the single beam and multiple beams can be applied for writing data and reading data in the disc, respectively. (c) 2007 Optical Society of America. |
URI: | http://dx.doi.org/10.1364/OE.15.001408 http://hdl.handle.net/11536/11120 |
ISSN: | 1094-4087 |
DOI: | 10.1364/OE.15.001408 |
期刊: | OPTICS EXPRESS |
Volume: | 15 |
Issue: | 4 |
起始頁: | 1408 |
結束頁: | 1414 |
顯示於類別: | 期刊論文 |