標題: | Low-temperature growth of ZnO nanorods in anodic aluminum oxide on Si substrate by atomic layer deposition |
作者: | Yang, Ching-Jung Wang, Shun-Min Liang, Shih-Wei Chang, Yung-Huang Chen, Chih Shieh, Jia-Min 材料科學與工程學系 Department of Materials Science and Engineering |
公開日期: | 15-一月-2007 |
摘要: | Low-temperature growth of self-organized ZnO nanorods on Si substrate is achieved using anodic aluminum oxide and atomic layer deposition at 250 degrees C without catalyst or seed layer. Photoluminescence spectrum indicates that the ZnO nanorod arrays exhibit a blue/green luminescence at 480 nm. In addition, the nanorod arrays demonstrate excellent field-emission properties with a turn-on electric field of 6.5 V mu m(-1) and a threshold electric field of 9.8 V mu m(-1), which are attributed to the perfectly perpendicular alignment of ZnO nanorods to the Si substrate. (c) 2007 American Institute of Physics. |
URI: | http://dx.doi.org/10.1063/1.2431786 http://hdl.handle.net/11536/11222 |
ISSN: | 0003-6951 |
DOI: | 10.1063/1.2431786 |
期刊: | APPLIED PHYSICS LETTERS |
Volume: | 90 |
Issue: | 3 |
結束頁: | |
顯示於類別: | 期刊論文 |