標題: Low-temperature growth of ZnO nanorods in anodic aluminum oxide on Si substrate by atomic layer deposition
作者: Yang, Ching-Jung
Wang, Shun-Min
Liang, Shih-Wei
Chang, Yung-Huang
Chen, Chih
Shieh, Jia-Min
材料科學與工程學系
Department of Materials Science and Engineering
公開日期: 15-一月-2007
摘要: Low-temperature growth of self-organized ZnO nanorods on Si substrate is achieved using anodic aluminum oxide and atomic layer deposition at 250 degrees C without catalyst or seed layer. Photoluminescence spectrum indicates that the ZnO nanorod arrays exhibit a blue/green luminescence at 480 nm. In addition, the nanorod arrays demonstrate excellent field-emission properties with a turn-on electric field of 6.5 V mu m(-1) and a threshold electric field of 9.8 V mu m(-1), which are attributed to the perfectly perpendicular alignment of ZnO nanorods to the Si substrate. (c) 2007 American Institute of Physics.
URI: http://dx.doi.org/10.1063/1.2431786
http://hdl.handle.net/11536/11222
ISSN: 0003-6951
DOI: 10.1063/1.2431786
期刊: APPLIED PHYSICS LETTERS
Volume: 90
Issue: 3
結束頁: 
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