標題: | Valence state map of iron oxide thin film obtained from electron spectroscopy imaging series |
作者: | Chen, Ko-Feng Lo, Shen-Chuan Chang, Li Egerton, Ray Kai, Ji-Jung Lin, Juhn-Jong Chen, Fu-Rong 材料科學與工程學系 電子物理學系 Department of Materials Science and Engineering Department of Electrophysics |
關鍵字: | valence state map;electron spectroscopic imaging(ESI);iron oxide system;electron energy-loss spectroscopy(EELS) |
公開日期: | 2007 |
摘要: | This paper demonstrates the applicability of electron-spectroscopic imaging (ESI) for valence-state mapping of the iron oxide system. We have previously developed a set of signal-processing methods for an EST series, to allow mapping Of sp(2)/sp(3) ratio, dielectric function and energy bandgap. In this study, these methods are applied to generate a valence-state map of an iron oxide thin film (Fe/alpha-Fe2O3). Two problems, data undersampling and a convolution effect associated with extraction of the image-spectrum from the core loss image series, were overcome by using cubic-polynomial interpolation and maximum-entropy deconvolution. As a result, the reconstructed image-spectrum obtained from the EST series images has a quality as good as that of conventional electron energy-loss spectra. The L-3/L-2 ratio of the reconstructed EST spectrum is determined to be 3.30 +/- 0.30 and 5.0 +/- 0.30 for Fe and alpha-Fe2O3, respectively. Our L-3/L-2, ratio mapping shows an accurate correspondence across the Cu/Fe/alpha-Fe2O3 region. The effect of delocalization and chromatic aberration on the EST resolution is discussed and estimated to be about 2 nm for the case of L-3/L-2, ratio mapping. (c) 2006 Published by Elsevier Ltd. |
URI: | http://hdl.handle.net/11536/11285 http://dx.doi.org/10.1016/j.micron.2006.06.004 |
ISSN: | 0968-4328 |
DOI: | 10.1016/j.micron.2006.06.004 |
期刊: | MICRON |
Volume: | 38 |
Issue: | 4 |
起始頁: | 354 |
結束頁: | 361 |
顯示於類別: | 期刊論文 |