Nanomechanical characteristics of BaxSr1-xTiO3 thin films

Abstract

The nanomechanical properties of barium strontium titanate (BaxSr1-xTiO3, x=0-1) deposited on a silicon substrate were investigated using the metalorganic deposition method. The characteristics of the BaxSr1-xTiO3 thin film's crystalline structure and surface roughness were achieved by means of X-ray diffraction (XRD) and atomic force microscopy (AFM). The results indicated that as the Ba content was decreased and therefore the Sr content was increased a lower leakage current density and a smaller grain size were obtained. Also the mechanical properties such as hardness, Young's modulus and contact stress-strain were also studied by nanoindentation. (c) 2006 Elsevier B.V. All rights reserved.