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dc.contributor.authorTien, C. H.en_US
dc.contributor.authorHung, C. H.en_US
dc.contributor.authorLee, C. H.en_US
dc.date.accessioned2014-12-08T15:16:18Z-
dc.date.available2014-12-08T15:16:18Z-
dc.date.issued2006-07-01en_US
dc.identifier.issn1041-1135en_US
dc.identifier.urihttp://dx.doi.org/10.1109/LPT.2006.880800en_US
dc.identifier.urihttp://hdl.handle.net/11536/12087-
dc.description.abstractWe developed a microoptical Ronchi interferometer system in which a V-groove, an out-of-plane grating, a beam splitter, and a 45 degrees upward reflector integrated on a single silicon chip were used to measure the wavefront aberration caused by a microlens on the fiber front end. By the use of the microelectromechanical systems configuration, the fringe patterns caused by the different spherical aberration and defocus balances of the 0.34-numerical-aperture microlens can be captured and analyzed accordingly. As demonstrated by the experimental results, the proposed setup is capable of carrying out a simple wavefront variation measurement in the microscopic scale.en_US
dc.language.isoen_USen_US
dc.subjectintegrated opticsen_US
dc.subjectmicroelectromechanical systems (MEMS)en_US
dc.subjectoptical componentsen_US
dc.subjectoptical device fabricationen_US
dc.titleAberrations measurement of fiber-end microlens by free-space microoptical Ronchi interferometeren_US
dc.typeArticleen_US
dc.identifier.doi10.1109/LPT.2006.880800en_US
dc.identifier.journalIEEE PHOTONICS TECHNOLOGY LETTERSen_US
dc.citation.volume18en_US
dc.citation.issue13-16en_US
dc.citation.spage1768en_US
dc.citation.epage1770en_US
dc.contributor.department光電工程學系zh_TW
dc.contributor.department顯示科技研究所zh_TW
dc.contributor.departmentDepartment of Photonicsen_US
dc.contributor.departmentInstitute of Displayen_US
dc.identifier.wosnumberWOS:000240417800121-
dc.citation.woscount1-
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