Title: | Aberrations measurement of fiber-end microlens by free-space microoptical Ronchi interferometer |
Authors: | Tien, C. H. Hung, C. H. Lee, C. H. 光電工程學系 顯示科技研究所 Department of Photonics Institute of Display |
Keywords: | integrated optics;microelectromechanical systems (MEMS);optical components;optical device fabrication |
Issue Date: | 1-Jul-2006 |
Abstract: | We developed a microoptical Ronchi interferometer system in which a V-groove, an out-of-plane grating, a beam splitter, and a 45 degrees upward reflector integrated on a single silicon chip were used to measure the wavefront aberration caused by a microlens on the fiber front end. By the use of the microelectromechanical systems configuration, the fringe patterns caused by the different spherical aberration and defocus balances of the 0.34-numerical-aperture microlens can be captured and analyzed accordingly. As demonstrated by the experimental results, the proposed setup is capable of carrying out a simple wavefront variation measurement in the microscopic scale. |
URI: | http://dx.doi.org/10.1109/LPT.2006.880800 http://hdl.handle.net/11536/12087 |
ISSN: | 1041-1135 |
DOI: | 10.1109/LPT.2006.880800 |
Journal: | IEEE PHOTONICS TECHNOLOGY LETTERS |
Volume: | 18 |
Issue: | 13-16 |
Begin Page: | 1768 |
End Page: | 1770 |
Appears in Collections: | Articles |
Files in This Item:
If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.