Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ko, FH | en_US |
dc.contributor.author | Weng, LY | en_US |
dc.contributor.author | Ko, CJ | en_US |
dc.contributor.author | Chu, TC | en_US |
dc.date.accessioned | 2014-12-08T15:16:52Z | - |
dc.date.available | 2014-12-08T15:16:52Z | - |
dc.date.issued | 2006-04-01 | en_US |
dc.identifier.issn | 0167-9317 | en_US |
dc.identifier.uri | http://dx.doi.org/10.1016/j.mee.2006.01.009 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/12395 | - |
dc.description.abstract | The method to measure the imprint temperature variation of resist film with fluorescence probe technique was established. The maximal Rhodamine B concentration was 8 X 10(-4) M to achieve higher sensitivity and avoid precipitation problem. The temperature effect was a critical parameter on the temperature sensing, while imprinting pressure was not. The fluorescence intensity of Rhodamine B linearly decayed with time at various temperatures due to the formation of lactone-containing molecule during thermal stressing. The usual imprint time of less than 20 min was not affected by the signal decay effect due to limited percentage of signal variation during 100200 degrees C. The technique based on fluorescence probe method was successfully applied to measure the resist temperature variation of the imprint on the resist film of 6-in. wafer. (c) 2006 Elsevier B.V. All rights reserved. | en_US |
dc.language.iso | en_US | en_US |
dc.subject | nanoimprint lithography | en_US |
dc.subject | imprinting temperature variation | en_US |
dc.subject | Rhodamine B molecule | en_US |
dc.title | Characterization of imprinting polymeric temperature variation with fluorescent Rhodamine B molecule | en_US |
dc.type | Article; Proceedings Paper | en_US |
dc.identifier.doi | 10.1016/j.mee.2006.01.009 | en_US |
dc.identifier.journal | MICROELECTRONIC ENGINEERING | en_US |
dc.citation.volume | 83 | en_US |
dc.citation.issue | 4-9 | en_US |
dc.citation.spage | 864 | en_US |
dc.citation.epage | 868 | en_US |
dc.contributor.department | 材料科學與工程學系奈米科技碩博班 | zh_TW |
dc.contributor.department | Graduate Program of Nanotechnology , Department of Materials Science and Engineering | en_US |
dc.identifier.wosnumber | WOS:000237581900060 | - |
Appears in Collections: | Conferences Paper |
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