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dc.contributor.authorCheng, C. W.en_US
dc.contributor.authorLee, I. M.en_US
dc.contributor.authorChen, J. S.en_US
dc.date.accessioned2015-07-21T08:29:22Z-
dc.date.available2015-07-21T08:29:22Z-
dc.date.issued2015-06-01en_US
dc.identifier.issn0143-8166en_US
dc.identifier.urihttp://dx.doi.org/10.1016/j.optlaseng.2015.01.011en_US
dc.identifier.urihttp://hdl.handle.net/11536/124440-
dc.description.abstractMicro- and nano-scale crystalline indium-tin-oxide (c-ITO) patterns fabricated from amorphous ITO (a-ITO) thin films on a glass substrate using a (low NA 0.26) femtosecond laser pulse that is not tightly focused are demonstrated. Different types of c-ITO patterns are obtained by controlling the laser pulse energies and pulse repetition rate of a femtosecond laser beam at a wavelength of 1064 nm: periodic micro c-ITO dots with diameters of similar to 1.4 mu m, two parallel c-ITO patterns with/without periodic-like glass nanostructures at a laser scanning path and nano-scale c-ITO line patterns with a line width similar to 900 nm, i.e. similar to 1/8 of the focused beam\'s diameter (7 mu m at 1/e(2)). (C) 2015 Elsevier Ltd. All rights reserved.en_US
dc.language.isoen_USen_US
dc.subjectFemtosecond laseren_US
dc.subjectIndium-tin-oxideen_US
dc.subjectCrystallizationen_US
dc.subjectNano-scaleen_US
dc.titleFemtosecond laser processing of indium-tin-oxide thin filmsen_US
dc.typeArticleen_US
dc.identifier.doi10.1016/j.optlaseng.2015.01.011en_US
dc.identifier.journalOPTICS AND LASERS IN ENGINEERINGen_US
dc.citation.volume69en_US
dc.contributor.department機械工程學系zh_TW
dc.contributor.departmentDepartment of Mechanical Engineeringen_US
dc.identifier.wosnumberWOS:000351806300001en_US
dc.citation.woscount0en_US
Appears in Collections:Articles