標題: Femtosecond laser-induced nanoperiodic structures and simultaneous crystallization in amorphous indium-tin-oxide thin films
作者: Cheng, C. W.
Lee, I. M.
Chen, J. S.
機械工程學系
Department of Mechanical Engineering
公開日期: 15-十月-2014
摘要: Fabrication of crystalline indium-tin-oxide (c-ITO) nanogratings and smooth line patterns on amorphous ITO (a-ITO) thin films by femtosecond laser-induced structuring and simultaneous crystallization followed by chemical etching is demonstrated. Three types of c-ITO structures are obtained merely by controlling the laser pulse energy of a high-repetition rate femtosecond laser at wavelength 532 nm: nanogratings perpendicular to laser polarization direction with period of 130 perpendicular to 11 nm, smooth c-ITO line patterns as well as nanogratings parallel to laser polarization direction with period of 390 +/- 10 nm. Large area c-ITO patterns and nanograting structures are fabricated, which are expected to be used in optoelectronic and micro-electronic devices. (C) 2014 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.apsusc.2014.07.071
http://hdl.handle.net/11536/25330
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2014.07.071
期刊: APPLIED SURFACE SCIENCE
Volume: 316
Issue: 
起始頁: 9
結束頁: 14
顯示於類別:期刊論文