標題: | Femtosecond laser-induced nanoperiodic structures and simultaneous crystallization in amorphous indium-tin-oxide thin films |
作者: | Cheng, C. W. Lee, I. M. Chen, J. S. 機械工程學系 Department of Mechanical Engineering |
公開日期: | 15-十月-2014 |
摘要: | Fabrication of crystalline indium-tin-oxide (c-ITO) nanogratings and smooth line patterns on amorphous ITO (a-ITO) thin films by femtosecond laser-induced structuring and simultaneous crystallization followed by chemical etching is demonstrated. Three types of c-ITO structures are obtained merely by controlling the laser pulse energy of a high-repetition rate femtosecond laser at wavelength 532 nm: nanogratings perpendicular to laser polarization direction with period of 130 perpendicular to 11 nm, smooth c-ITO line patterns as well as nanogratings parallel to laser polarization direction with period of 390 +/- 10 nm. Large area c-ITO patterns and nanograting structures are fabricated, which are expected to be used in optoelectronic and micro-electronic devices. (C) 2014 Elsevier B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.apsusc.2014.07.071 http://hdl.handle.net/11536/25330 |
ISSN: | 0169-4332 |
DOI: | 10.1016/j.apsusc.2014.07.071 |
期刊: | APPLIED SURFACE SCIENCE |
Volume: | 316 |
Issue: | |
起始頁: | 9 |
結束頁: | 14 |
顯示於類別: | 期刊論文 |