标题: | An Optomechatronics Inspection Technique of TFT Array Flaw Applied to Medical Display |
作者: | Wang, Yao-Chin Lin, Bor-Shyh 光电系统研究所 影像与生医光电研究所 生医电子转译研究中心 Institute of Photonic System Institute of Imaging and Biomedical Photonics Biomedical Electronics Translational Research Center |
关键字: | Flaw detection;medical display;optomechatronics inspection;thin-film-transistor (TFT) array;ultrahigh-definition (UHD) |
公开日期: | 1-二月-2015 |
摘要: | For medical display, the pixels on array panels are getting smaller. Therefore, flaw detection and measurement are getting more difficult and critical for managing yield and quality in a thin-film-transistor (TFT) array process. The TFT array testing technique has been used for flaw detection and process yield control. As the TFT array pixel size is getting smaller and the resolution is getting higher, both of them have encountered a performance limitation in detecting the critical small-pixel defect for the ultrahigh-resolution TFT array such as medical display applications. In this study, a novel approach for flaw detection is proposed. The proposed optomechatronics technique with interdigitized shorting bar design configuration is used for inspection. The experimental results show that, by using the voltage imaging technique, the flaw detection rate for small-pixel size, high-resolution TFT array has been effectively improved from 50% to 80%. The detected subpixel size for a TFT array panel can be smaller than 53 mu m for a 30-inch ultrahigh-definition medical display application. |
URI: | http://dx.doi.org/10.1109/TMECH.2014.2306439 http://hdl.handle.net/11536/124573 |
ISSN: | 1083-4435 |
DOI: | 10.1109/TMECH.2014.2306439 |
期刊: | IEEE-ASME TRANSACTIONS ON MECHATRONICS |
Volume: | 20 |
起始页: | 321 |
结束页: | 326 |
显示于类别: | Articles |