标题: An Optomechatronics Inspection Technique of TFT Array Flaw Applied to Medical Display
作者: Wang, Yao-Chin
Lin, Bor-Shyh
光电系统研究所
影像与生医光电研究所
生医电子转译研究中心
Institute of Photonic System
Institute of Imaging and Biomedical Photonics
Biomedical Electronics Translational Research Center
关键字: Flaw detection;medical display;optomechatronics inspection;thin-film-transistor (TFT) array;ultrahigh-definition (UHD)
公开日期: 1-二月-2015
摘要: For medical display, the pixels on array panels are getting smaller. Therefore, flaw detection and measurement are getting more difficult and critical for managing yield and quality in a thin-film-transistor (TFT) array process. The TFT array testing technique has been used for flaw detection and process yield control. As the TFT array pixel size is getting smaller and the resolution is getting higher, both of them have encountered a performance limitation in detecting the critical small-pixel defect for the ultrahigh-resolution TFT array such as medical display applications. In this study, a novel approach for flaw detection is proposed. The proposed optomechatronics technique with interdigitized shorting bar design configuration is used for inspection. The experimental results show that, by using the voltage imaging technique, the flaw detection rate for small-pixel size, high-resolution TFT array has been effectively improved from 50% to 80%. The detected subpixel size for a TFT array panel can be smaller than 53 mu m for a 30-inch ultrahigh-definition medical display application.
URI: http://dx.doi.org/10.1109/TMECH.2014.2306439
http://hdl.handle.net/11536/124573
ISSN: 1083-4435
DOI: 10.1109/TMECH.2014.2306439
期刊: IEEE-ASME TRANSACTIONS ON MECHATRONICS
Volume: 20
起始页: 321
结束页: 326
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