| 標題: | Film Profile Engineering (FPE): A New Concept for Manufacturing of Short-Channel Metal Oxide TFTs |
| 作者: | Lyu, Rong-Jhe Lin, Horng-Chih Wu, Ming-Hung Shie, Bo-Shiuan Hung, Hsiang-Ting Huang, Tiao-Yuan 電機工程學系 Department of Electrical and Computer Engineering |
| 公開日期: | 1-Jan-2013 |
| 摘要: | A film profile engineering (FPE) concept which utilizes the unique features of various deposition tools to tailor and optimize the profile of the deposited films was demonstrated with the fabricated ZnO TFTs. By implementing the PR trimming technique, high performance devices with L < 100 nm can be readily achieved. |
| URI: | http://hdl.handle.net/11536/124958 |
| ISBN: | 978-1-4799-2306-9 |
| ISSN: | |
| 期刊: | 2013 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM) |
| Appears in Collections: | Conferences Paper |
- Implementation of Film Profile Engineering in the Fabrication of ZnO Thin-Film Transistors / Lyu, Rong-Jhe;Lin, Horng-Chih;Huang, Tiao-Yuan
- 100-nm IGZO Thin-Film Transistors With Film Profile Engineering / Lin, Horng-Chih;Shie, Bo-Shiuan;Huang, Tiao-Yuan
- Fabrication and Characterization of Film Profile Engineered ZnO TFTs With Discrete Gates / Lyu, Rong-Jhe;Lin, Horng-Chih;Huang, Tiao-Yuan
- Effects of Gate Dielectric and Process Treatments on the Electrical Characteristics of IGZO TFTs With Film Profile Engineering / Shie, Bo-Shiuan;Lin, Horng-Chih;Lyu, Rong-Jye;Huang, Tiao-Yuan
- Downscaling Metal-Oxide Thin-Film Transistors to Sub-50 nm in an Exquisite Film-Profile Engineering Approach / Lyu, Rong-Jhe;Shie, Bo-Shiuan;Lin, Horng-Chih;Li, Pei-Wen;Huang, Tiao-Yuan
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