標題: | Fabrication of various curved relief structures through concave surface forming and soft replica molding |
作者: | Shih, TK Chen, CF Ho, JR Chuang, FT 材料科學與工程學系 Department of Materials Science and Engineering |
關鍵字: | soft replica molding;concave surface forming;curved relief structures |
公開日期: | 1-Mar-2006 |
摘要: | In this case, our groups presented various optical structures through the presented method, involving concave surface forming and soft replica molding. The method of concave surface forming is mainly for the fabrication of concave surface. The method of soft replica molding is mainly for the fabrication of replica. Concave and convex relief structures, including circular curved relief structures, convex relief structures with platform structures on the top, refractive beam-shaping elements, these structures with dual curvatures and asymmetric structures, can be easily made through the presented method, respectively. All processes of manufacture are in several simple steps without multistep optical lithography and complex masks. (c) 2005 Elsevier B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.mee.2005.11.011 http://hdl.handle.net/11536/12514 |
ISSN: | 0167-9317 |
DOI: | 10.1016/j.mee.2005.11.011 |
期刊: | MICROELECTRONIC ENGINEERING |
Volume: | 83 |
Issue: | 3 |
起始頁: | 471 |
結束頁: | 475 |
Appears in Collections: | Articles |
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