標題: Design and fabrication of an electrothermal microactuator for multi-level conveying
作者: Wu, CT
Hsu, WY
機械工程學系
Department of Mechanical Engineering
公開日期: 1-Mar-2006
摘要: During the past years, a variety of microactuators developed for micro-conveyors have been presented. However, such micro-conveyors can only provide conveying motion in a single plane. Here an electrothermally driven microactuator with a capability of adjustable height is proposed, which may act as a basic unit for multi-level conveyors. This microactuator is based on the principle of thermal bimorph actuation with two long conveying fingers to exert out-of-plane bending motions in the transversal direction, which are connected and lifted by an initially curved height adjuster in the longitudinal direction. The devices can provide conveyance of micro-objects between two plane levels of different heights. The testing results show that the two fingers and a height adjuster can be actuated simultaneously and individually with little thermal crosstalk. The proposed device with a dimension of 900x100x4.5 mu m(3) can provide 5 mu m vertical displacements by the height adjuster at 1 V and 18 mu m lateral displacements by the conveying finger at 2 V. Simulations by finite-element program ANSYS 5.7 have been performed and widely match with testing results.
URI: http://dx.doi.org/10.1007/s00542-005-0061-3
http://hdl.handle.net/11536/12576
ISSN: 0946-7076
DOI: 10.1007/s00542-005-0061-3
期刊: MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume: 12
Issue: 4
起始頁: 293
結束頁: 298
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