标题: 矽基片B型抗谐振反射光波导表面电浆共振感测器之设计,研制与特性量测
Design, Fabrication, and Characterization of Si-Based ARROW-B SPR Sensors
作者: 徐新峯
Hsu, Hsin-Feng
黄远东
崔秉钺
陈琼华
Huang, Yang-Tung
Tsui, Bing-Yue
Chen, Chyong-Hua
电子工程学系 电子研究所
关键字: B型抗谐振反射光波导;波导;表面电浆共振;生物感测器;表面电浆共振;ARROW-B;waveguide;SPR;biosensors;surface plasmon resonance
公开日期: 2015
摘要: 本论文提出矽基片B型抗谐振反射光波导(ARROW-B)表面电浆共振(SPR)感测器,并将流道量测系统整合于此感测器,以利于水中环境之生化检测。论文中介绍模拟分析和设计此元件所用的方法,探讨B型抗谐振反射光波导之模态特性,以及结合表面电浆共振金属层之感测特性。光波导式之表面电浆感测元件较传统棱镜式具有可与其他光学元件整合为积体光路之潜力,又因抗谐振反射光波导较传统光波导具有较大的核心尺寸,因此可有效与单模光纤相匹配。本论文利用强度及波谱两种分析方法来探讨此矽基片B型抗谐振反射光波导表面电浆共振感测器的特性。首先,我们先使用不同浓度氯化钠水溶液并以强度分析方法来验证此元件的基本特性,并获得其灵敏度为2.9×10^3 μW/RIU及相对应解析度为6.2×10^-5 RIU。再以氨水、双氧水混合溶液(APM)去除固定于元件表面的自组装单分子层(SAM),确认此元件可在原处再生,不需光路重新对准的状况下经重复十二次实验后获得差异数值在4%以内,验证此元件的再利用性。我们最后使用波谱分析法验证此元件的感测效能,显现其灵敏度为1312 nm/RIU,解析度为9.15×10-5 RIU。
A Si-based antiresonant reflecting optical waveguide of type B(ARROW-B) surface plasmon resonance sensor is proposed. The liquid-flow system integrated with this surface plasmon resonance sensor is designed for the biochemical detection in an aqueous environment. Numerical methods for analyzing and designing this device are introduced. Modal characteristics of the ARROW-B structures and sensing characteristics of this ARROW-B SPR sensor are revealed. Compared with a prism based structure, a waveguide based SPR sensor has the potential of the integration with optical circuits. Furthermore, compared with conventional waveguides, the ARROW-based waveguides have relatively large core size, giving rise to a better coupling efficiency for a single-mode fiber. This proposed ARROW-B SPR sensor would be analyzed by both the intensity and spectral interrogation methods. First, we characterize the intensity variations of this sensor by using sodium chloride solutions. The measured sensitivity is 2.9×10^3 μW/RIU, and the corresponding resolution is 6.2×10^-5 RIU. The ammonia-hydrogen mixture (APM) solutions stripe the self-assembled monolayer (SAM) immobilized on this sensor surface to exhibit the in-situ regeneration of this sensor. Without the realignment of the optical measurement system, the power of this sensor was varied only within 4% after 12-time regenerations, verifying the reusability of this sensor. The spectral interrogation method is also used to demonstrate the performance of this sensor. The sensitivity of 1312 nm/RIU with the corresponding resolution of 9.15×10^-5 RIU is obtained.
URI: http://140.113.39.130/cdrfb3/record/nctu/#GT079611815
http://hdl.handle.net/11536/125826
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