某半導體廠無機酸性白煙改善與研究

Abstract

無機酸性氣體所產生的白色煙霧是許多電子產業製程中所產生的副產物，其中包括半導體及光電產業，由於無機酸性煙霧微粒的粒徑極小，使其得以通過人體的上呼吸道造成肺部的病變，嚴重破壞人體健康。因此，如何控制酸性煙霧及次微米微粒的排放是目前空氣污染防治技術的重要方向。本論文的研究範圍是針對新竹科學工業園區某半導體廠因酸性蝕刻製程過程中，所產生無機酸性氣體白色煙霧而影響人體健康及造成環境的破壞。有鑑於此，本文研究將分為兩個階段進行改善與研究: 1.實驗過程概述:第一階段必需先瞭解該廠區廠內無機酸性蝕刻機台(WetBench)所使用化學藥品類型及特性，並於實驗前裝置小型實驗用過濾器於蝕刻機台排氣出口端，在小型實驗用過濾器入口端及出口端分別設置透明PVC管，以觀察從透明PVC管線目視實驗用過濾器之白煙處理效率。而在實驗過程中；觀察進入小型實驗用過濾器之無機酸性白煙不透光率約在60%，當無機酸性煙霧經過該過濾器後，其出口端不透光率約在10%，(已經符合環保法規所管制不透光率在20%以下)，所以以此實驗為依據，進行下一階段無機酸性白煙工程實務減量改善工程。 2.工程實務減量改善概述：先將產線製程蝕刻機台所產生無機酸性白煙廢排氣支管線匯集後連接至廠務端酸性廢排氣主管線，再由酸廢排氣主管線銜接至編號：A001廠務端酸性洗滌塔，其中串接無機酸性白煙除霧器，使白煙除霧器能捕捉到3μm以下的次微米酸煙霧，除霧器後端出口再與編號:A002酸性洗滌塔進行銜接，最後經由尾氣排放。此工程設置完成後，將進行為期四個月導入測試運轉，並藉由運轉過程中，記錄監測數據與調整，取得最佳化運轉數據，在最佳化調整後運轉的處理效率之下，能符合環保法規之規定。

Inorganic acid gases generated white smoke is a byproduct of many processes in the electronics industry generated, including semiconductor and optoelectronics industry, due to the acidic smoke particles of inorganic particle is extremely small, so that it could cause lung disease through the upper respiratory tract of the human body serious damage to human health. Therefore, how to control the emission of acid fumes and sub-micron particles is an important direction of air pollution control technology. The scope of this paper is to Hsinchu Science Park for a semiconductor plant due process of acid etching process, inorganic acid gases generated white smoke affect human health and damage the environment. For this reason, this study will be divided into two stages improvement and research: 1.Overview of the experiment: the first phase of the plant is necessary to first understand the plant area of inorganic acid etching machine (Wet Bench) the type and characteristics of the use of chemicals, and in small-scale experiments before experimental apparatus for etching machine filters the exhaust outlet end, in small experimental filter inlet end and an outlet end settings were transparent PVC pipe, used to observe visually experimental treatment efficiency filter of white smoke from the transparent PVC pipes. In the course of the experiment; small experimental observation into the filter used inorganic acidic white smoke opacity of about 60%, when the inorganic acidic smoke after the filter, the outlet end of the opacity of about 10%, (already comply with environmental regulations are not regulated by light transmittance of 20% or less), so this experiment as the basis for the next phase of engineering practice inorganic acidic white smoke reduction improvements. 2.Inorganic acidic white smoke exhaust waste collection after gas pipeline branch connection to the factory service terminal acidic waste exhaust mains, then the title of the acid waste exhaust is connected to the main line number generated by the first production line process etching machine: Engineering Practice reduction improvements outlined : A001 Facility terminal acidic scrubber, which cascaded inorganic acidic white smoke defogger, make white smoke defogger can capture 3μm following sub-micron acid fumes, mist eliminators and then with the back-end export number: A002 acidic scrubber converge, finally discharged through the exhaust. After setting this project is completed, will be introducing a four-month test run, and by operation of the process, monitoring data and record adjustments to achieve the best of operating data processing efficiency under optimal adjustment after the operation, and can compliance with environmental laws and regulations.