半導體在製品預先預約與傳送之設計與實作

Abstract

全球半導體相關產業競爭相當激烈，而建造一座半導體製造廠所需的費用隨著製程世代的演進也跟著越來越高。因此各家半導體製造商無不想盡辦法在不增加成本的考量之下，藉由改善製程來提升良率、降低製程機台閒置時間來提升使用率與產出、或是縮短在製品閒置等待時間來降低生產製造週期等方式來有效的增加所屬的每一座製造廠產出，降低產品製造成本增加獲利來提升公司競爭力。本篇論文將藉由新增修改既有的自動化相關系統程式，在原本的自動化生產製造控制流程，設計與實作了在製品預先預約與傳送的功能，降低製程機台閒置時間，有效的縮短原先製程機台必須等待在製品傳送到輸入輸出埠所耗費的時間，於是製程機台就能夠不間斷的持續生產在製品，提升製程機台使用率與產能。論文中並挑選了半導體製造廠內幾台製程機台來進行實驗，而實驗的結果證實了這個方法是有效的。

The completion of the global semiconductor industry is quite intense, and the cost for building a semiconductor factory is increasing along with generation evolution.

Therefore, semiconductor manufacturers try various approaches to stay competitive at no additional cost, by improving the manufacturing process to improve yield, reducing the idle time of process equipment to improve utilization and throughput, or shortening the WIP waiting time to reduce manufacturing cycle time. Some companies try to improve the company’s competitiveness by effectively increasing throughput of each factory, and reducing manufacturing costs to increase profits. This thesis designs and implements a new strategy called Pre-reserve function by modifying the existing automation-related system and changing the original control flow, in order to reduce the idle time of process equipment to improve utilization and throughput, and to reduce manufacturing costs to increase profits to improve the company's Competitiveness. The experimental results demonstrate the effectiveness of the proposed strategy. In this thesis, it will also select several process equipments of the semiconductor factory to experiment, and the results of experiments demonstrate the effectiveness of the proposed strategy.