預測干擾觀測器應用於半導體製程的隨機干擾

Full metadata record

DC Field	Value	Language
dc.contributor.author	蔡德修	en_US
dc.contributor.author	Tsai, Te-Hsiu	en_US
dc.contributor.author	李安謙	en_US
dc.contributor.author	Lee, An-Chen	en_US
dc.date.accessioned	2015-11-26T00:56:49Z	-
dc.date.available	2015-11-26T00:56:49Z	-
dc.date.issued	2015	en_US
dc.identifier.uri	http://140.113.39.130/cdrfb3/record/nctu/#GT070251086	en_US
dc.identifier.uri	http://hdl.handle.net/11536/126703	-
dc.language.iso	zh_TW	en_US
dc.subject	批次控制	zh_TW
dc.subject	隨機干擾	zh_TW
dc.subject	最小變異控制	zh_TW
dc.subject	干擾觀測器	zh_TW
dc.subject	Run-to-Run control	en_US
dc.subject	Stochastic Disturbance	en_US
dc.subject	Minimum Variance control	en_US
dc.subject	Disturbance Observer	en_US
dc.title	預測干擾觀測器應用於半導體製程的隨機干擾	zh_TW
dc.title	Predictive Disturbance Observer Structure Applied to Stochastic Disturbances of Semiconductor Process	en_US
dc.type	Thesis	en_US
dc.contributor.department	機械工程系所	zh_TW
Appears in Collections:	Thesis