電漿表面處理對多晶矽穿隧式薄膜電晶體之影響

標題:	電漿表面處理對多晶矽穿隧式薄膜電晶體之影響 Effect of Plasma Surface Treatment on Polycrystalline-Silicon Tunnel Thin-Film Transistor
作者:	許博揚 Hsu, Po-Yang 趙天生 Chao, Tien-Sheng 電子物理系所
關鍵字:	穿隧式薄膜場效電晶體;電漿處理;熱載子可靠度;T-TFT;Plasma treatment;Hot carrier reliability
公開日期:	2015
URI:	http://140.113.39.130/cdrfb3/record/nctu/#GT070252033 http://hdl.handle.net/11536/126949
Appears in Collections:	Thesis