Strong optical nonlinearity of the nonstoichiometric silicon carbide

Abstract

Enhanced nonlinear refractive indices and absorption coefficients of nonstoichiometric SixC1-x with varying C/Si composition ratios from 0.51 to 1.83 grown by low-temperature plasma-enhanced chemical vapor deposition are demonstrated. When increasing the [CH4]/[CH4 + SiH4] fluence ratio from 70% to 92%, two Raman scattering signals at 795 and 970 cm(-1) contributed by transverse and longitudinal optical modes of Si-C bonds are simultaneously enhanced in stoichiometric and C-rich SixC1-x samples, whereas the Si-associated Raman peak at 520 cm(-1) decreases with increasing C/Si composition ratio. The C-rich SixC1-x film shows additional Raman scattering peaks at 1330 and 1580 cm(-1), which are individually contributed by the diamond-like C-C bonds and the G peak of the graphite-like C-C bonds, respectively. The nonlinear refractive index increases to 1 +/- 0.1 x 10(-11) cm(2) W-1 upon increasing the C/Si composition ratio up to 1.83, which is four orders of magnitude higher than that of bulk SiC. The increased C/Si composition ratio reduces the lattice constant and the effective mass of the SixC1-x film and enhances its nonlinear refractive index effectively. In comparison with the sp(3)-orbital C-C bond, the sp(2)-orbital C-C bond in SixC1-x films dominates the enhancement of nonlinear refractive index. By contrast, the nonlinear absorption coefficient changes sign and decreases magnitude when transferring the SixC1-x film from Si-rich to C-rich conditions. This sign reversal is primarily attributed to the conversion in the absorption mechanism from two-photon absorption to nonlinear saturable absorption. Unlike Si-Si bonds which favor two-photon absorption, the sp(2)-orbital C-C bonds with delocalized pi-electrons essentially enhance the saturable absorbance. Hence, a higher nonlinear refractive index and a higher saturable absorption coefficient can be obtained by enriching the sp(2)-orbital C-C bonds in C-rich SixC1-x films.