標題: MONOLITHIC NI-ELECTROPLATED MICROSTRUCTURE AND ITS APPLICATION IN MICRO MIRRORS AND MICRO ASSEMBLY
作者: Chiu, Yi
Lai, Wen-Ching
Chang, Chun-Hao
Chang, Chun-Po
Chen, Ching-Hung
Lai, Chih-Hsiang
Hsu, Wei-Hung
交大名義發表
National Chiao Tung University
公開日期: 1-Jan-2014
摘要: This paper presents micro mirrors and micro assembly mechanisms fabricated by monolithic nickel electroplating. Multiple nickel structural layers were electroplated and patterned with copper as the sacrificial material. A novel side latch design was proposed and demonstrated for 3D micro assembly of micro mirrors by simple push operation of micro probes. Micro mirrors was assembled in about 15 sec in laboratory tests. The resonance frequency of the scanning mode of a stand-alone micro mirror was measured to be 4.753 kHz with a quality factor of about 470.
URI: http://hdl.handle.net/11536/129800
ISSN: 2160-5033
期刊: 2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)
起始頁: 97
結束頁: 98
Appears in Collections:Conferences Paper