關鍵新穎技術大氣電漿沉積高品質薄膜鎵鋅氧化物開發及其高可靠度平面顯示器薄膜電晶體之製作(I)

Full metadata record

DC Field	Value	Language
dc.contributor.author	張國明	zh_TW
dc.contributor.author	CHANG KOW-MING	en_US
dc.date.accessioned	2016-03-28T08:17:26Z	-
dc.date.available	2016-03-28T08:17:26Z	-
dc.date.issued	2015	en_US
dc.identifier.govdoc	MOST104-2221-E009-125	zh_TW
dc.identifier.uri	http://hdl.handle.net/11536/130021	-
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=11588369&docId=473325	en_US
dc.description.sponsorship	科技部	zh_TW
dc.language.iso	zh_TW	en_US
dc.title	關鍵新穎技術大氣電漿沉積高品質薄膜鎵鋅氧化物開發及其高可靠度平面顯示器薄膜電晶體之製作(I)	zh_TW
dc.title	Developement of High Quality GZO Thin Films Deposited by Novel AP-PECVD System and Fabrication of High-Reliability GZO TFT (I)	en_US
dc.type	Plan	en_US
dc.contributor.department	國立交通大學電子工程學系及電子研究所	zh_TW
Appears in Collections:	Research Plans