标题: | 高CO选择比之PdO奈米片薄膜低温气体感测技术应用研究 PdO Nanoflake Thin Films for Low Tempearature Gas Sensors of High CO Selectivity |
作者: | 潘扶民 PAN FU-MING 国立交通大学材料科学与工程学系(所) |
关键字: | 氧化钯;NiO;Co3O4;气体感测;奈米片薄膜;一氧化碳;氢气;电子鼻;Palladium oxide;NiO;Co3O4;gas sensor;nanoflake thin film;carbon monoxide;hydrogen;electronic nose |
公开日期: | 2015 |
摘要: | 本计划拟制备p-type氧化物半导体奈米结构薄膜,探讨奈米结构薄膜在低温气体感测器(gas sensor)的应用,p-type氧化物包含PdO,NiO与Co3O4等,其中PdO将为主要之研究重点材料,我们利用活性溅镀沉积法(reactive sputter deposition)制作氧化钯(PdO)奈米片(nanoflake)结构薄膜,应用于低浓度CO与H2之低温气体感测器开发。PdO奈米片薄膜具有开放的巨大表面积,可以快速大量地吸附气体分子,有利气体感测效能。PdO对于CO气体有相当复杂的感测行为,而对氢气则有极度灵敏的响应。在本申请案中,我们将深入探讨常温至300oC温度范围内,PdO对CO与H2气体感测响应机制,改进PdO感测效能;研究内容包括:(A) PdO对CO/干空气的感测机制,(B) PdO对H2气的感测机制,及H2气对CO感测行为的影响,并且研究(C) 湿气对PdO气体感测行为的影响;期望藉由这些研究成果建立PdO最佳化的CO感测条件。此外,本计画将利用PdO在150oC时,对CO感应所显现电导率反转的特性,开发具电子鼻概念,高CO/H2选择比的低温PdO气体感测器,我们将整合多个独立操作于150oC及其他温度的PdO感测元件于一个气体感测器系统上,利用PdO对CO与H2气体感测响应行为的差异,提升PdO的气体感测选择比。除了PdO奈米片薄膜,我们亦利用化学浴沉积法(chemical bath deposition)合成NiO与Co3O4奈米片薄膜,由于这两种薄膜亦为p-type氧化物半导体,并呈现与PdO奈米片薄膜类似的形貌结构,有利提升气体感测灵敏性与响应速率。我们将研究这两种p-type氧化物半导体对各种还原性气体的感测特性。 In this research, we will prepare nanostructured p-type oxide semiconductor thin films, and study their gas sensing behavior at low temperatures. This proposal will stress on the CO gas sensing of PdO thin films deposited on the silicon oxide substrate by reactive sputter deposition. The thin film has a nanoflake-like morphology, which provides an open surface with a tremendous area allowing for quick responses to gas adsorption. The PdO thin film has a complex gas sensing behavior toward CO, and exhibits a very sensitive sensing response to hydrogen. We will investigate the gas sensing response of the PdO nanoflake thin film to CO and H2 at temperatures below 300oC. The objectives of the research include (a) the study on the sensing mechanism of PdO toward CO/dry-air, (B) the study on the sensing mechanism of PdO toward H2 and the effect of H2 on the PdO sensing behavior toward CO, and (C) the effect of moisture on the PdO sensing behavior. PdO has an inversed change in the electrical conductivity upon the CO exposure. Based on this behavior, which is not observed for the sensing of other reductive gases, we will develop a CO gas sensing system of high CO selectivity. Several PdO sensing devices individually operating at 150oC and other temperatures will be integrated into one sensor system. In addition to the PdO nanoflake thin films, we will also synthesize low cost NiO and Co3O4 nanoflake thin films by chemical bath deposition for the study of the gas sensing characteristics of various reductive gases. Because these two oxides are p-type semiconductors and with a large open surface area as well , we expect that they have a similar sensing behavior toward reductive gases as the PdO nanoflake thin film at low temperatures. |
官方说明文件#: | NSC102-2221-E009-046-MY3 |
URI: | http://hdl.handle.net/11536/130226 https://www.grb.gov.tw/search/planDetail?id=11269407&docId=454738 |
显示于类别: | Research Plans |