活性濺鍍氧化鈀奈米片薄膜及低溫CO氣體感測器應用研究

Abstract

在本申請研究計劃擬利用活性濺鍍沉積法製作PdO 奈米片結構薄膜，研究PdO 奈米片 結構薄膜成長機制，並進行PdO 奈米片薄膜在低溫CO 氣體感測器(gas sensor)的應用。 在PdO 奈米片薄膜製備與成長機制研究項目裡，申請人將調變PdO 薄膜製程參數，觀 察奈米片晶粒成長演化，推導PdO 奈米片薄膜成長機制；並將開發PdO 奈米薄片薄膜 沉積在軟性材料基板的製程方法；我們亦將嘗試開發TO2，ZnO，WO3 等奈米片薄膜製 程研究。在CO 氣體感測研究項目裡，我們會進行CO 吸附在PdO 奈米片表面化學態分 析，研究其與CO 氣體感測性能的關聯性；此外我們將嘗試進行光輔助CO 氣體感測研 究，藉由PdO 對可見光與子外光靈敏的光感應，改變CO 在PdO 表面的吸附行為，進 而調變PdO 對CO 的感測效能；我們亦會利用光催化與熱氧化方法促使PdO 回復對CO 的感測能力。

We plane to study the growth of PdO nanoflake thin films on various substrates by reactive sputter deposition (RSD), and evaluate the application of the nanoflake thin film for low temperature CO gas sensors. We will investigate the evolution process of the single crystalline PdO nanoflake and propose a growth mechanism for the PdO nanoflake. We will also deposit the PdO nanoflake thin film on flexible substrates for disposable applications. Based on the result of the study of the growth mechanism of PdO nanoflake grains, we will try to develop deposition methods for TO2, ZnO andWO3 nanoflake thin films by RSD. For CO gas sensor applications, we will first study CO adsorption on the PdO nanoflake thin film by XPS and TDS. The CO adsorption study will be correlated with CO gas sensing characteristics of the PdO nanoflake thin film. Photo-assisted CO gas sensing on the PdO nanoflake thin film will also investigated. Reactivate the sensing sensitivity of a poisoned PdO nanoflake thin film will be studied using photocatalytic reactivation and thermal oxidation reactivation methods.