標題: | 預測干擾觀測器應用於半導體製程的隨機干擾之開發研究 Predictive Disturbance Observer Structure Applied to Semiconductor Manufacturing Process under Different Kinds of Stochastic Disturbances |
作者: | 李安謙 LEE AN-CHEN 國立交通大學機械工程學系(所) |
公開日期: | 2016 |
官方說明文件#: | MOST104-2221-E009-027-MY2 |
URI: | http://hdl.handle.net/11536/130921 https://www.grb.gov.tw/search/planDetail?id=11718500&docId=478720 |
Appears in Collections: | Research Plans |