標題: Novel poly-silicon nanowire field effect transistor for biosensing application
作者: Hsiao, Cheng-Yun
Lin, Chih-Heng
Hung, Cheng-Hsiung
Su, Chun-Jung
Lo, Yen-Ren
Lee, Cheng-Che
Lin, Horng-Chin
Ko, Fu-Hsiang
Huang, Tiao-Yuan
Yang, Yuh-Shyong
材料科學與工程學系奈米科技碩博班
生物科技學系
電子工程學系及電子研究所
Graduate Program of Nanotechnology , Department of Materials Science and Engineering
Department of Biological Science and Technology
Department of Electronics Engineering and Institute of Electronics
關鍵字: Nanowire field effect transistor;Biosensing;Semiconductor device
公開日期: 1-一月-2009
摘要: A simple and low-cost method to fabricate poly-silicon nanowire field effect transistor (poly-Si NW FET) for biosensing application was demonstrated. The poly-silicon nanowire (poly-Si NW) channel was fabricated by employing the poly-silicon (poly-Si) sidewall spacer technique, which approach was comparable with current commercial semiconductor process and forsaken expensive E-beam lithography tools. The electronic properties of the poly-Si NW FET in aqueous solution were found to be similar to those of single-crystal silicon nanowire held effect transistors reported in the literature. A model biotin and avidin/streptavidin sensing system was used to demonstrate the biosensing capacity of poly-Si NW FET. The changes Of ID-VG curves were consistent with an n-type FET affected by a nearby negatively (streptavidin) and positively (avidin) charged molecules, respectively. Specific electric changes were observed for streptavidin and avidin sensing when nanowire surface of poly-Si NW FET was modified with biotin and streptavidin at sub pM to nM range could be distinguished. With its excellent electric properties and the potential for mass commercial production, poly-Si NW FET can be a very useful transducer for a variety of biosensing applications. (C) 2008 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.bios.2008.07.032
http://hdl.handle.net/11536/13200
ISSN: 0956-5663
DOI: 10.1016/j.bios.2008.07.032
期刊: BIOSENSORS & BIOELECTRONICS
Volume: 24
Issue: 5
起始頁: 1223
結束頁: 1229
顯示於類別:會議論文


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