標題: | Novel poly-silicon nanowire field effect transistor for biosensing application |
作者: | Hsiao, Cheng-Yun Lin, Chih-Heng Hung, Cheng-Hsiung Su, Chun-Jung Lo, Yen-Ren Lee, Cheng-Che Lin, Horng-Chin Ko, Fu-Hsiang Huang, Tiao-Yuan Yang, Yuh-Shyong 材料科學與工程學系奈米科技碩博班 生物科技學系 電子工程學系及電子研究所 Graduate Program of Nanotechnology , Department of Materials Science and Engineering Department of Biological Science and Technology Department of Electronics Engineering and Institute of Electronics |
關鍵字: | Nanowire field effect transistor;Biosensing;Semiconductor device |
公開日期: | 1-一月-2009 |
摘要: | A simple and low-cost method to fabricate poly-silicon nanowire field effect transistor (poly-Si NW FET) for biosensing application was demonstrated. The poly-silicon nanowire (poly-Si NW) channel was fabricated by employing the poly-silicon (poly-Si) sidewall spacer technique, which approach was comparable with current commercial semiconductor process and forsaken expensive E-beam lithography tools. The electronic properties of the poly-Si NW FET in aqueous solution were found to be similar to those of single-crystal silicon nanowire held effect transistors reported in the literature. A model biotin and avidin/streptavidin sensing system was used to demonstrate the biosensing capacity of poly-Si NW FET. The changes Of ID-VG curves were consistent with an n-type FET affected by a nearby negatively (streptavidin) and positively (avidin) charged molecules, respectively. Specific electric changes were observed for streptavidin and avidin sensing when nanowire surface of poly-Si NW FET was modified with biotin and streptavidin at sub pM to nM range could be distinguished. With its excellent electric properties and the potential for mass commercial production, poly-Si NW FET can be a very useful transducer for a variety of biosensing applications. (C) 2008 Elsevier B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.bios.2008.07.032 http://hdl.handle.net/11536/13200 |
ISSN: | 0956-5663 |
DOI: | 10.1016/j.bios.2008.07.032 |
期刊: | BIOSENSORS & BIOELECTRONICS |
Volume: | 24 |
Issue: | 5 |
起始頁: | 1223 |
結束頁: | 1229 |
顯示於類別: | 會議論文 |