Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 冉曉雯 | en_US |
dc.contributor.author | 孟心飛 | en_US |
dc.contributor.author | 鄭宏志 | en_US |
dc.contributor.author | 莊明諺 | en_US |
dc.contributor.author | 林洪正 | en_US |
dc.contributor.author | 鍾龍江 | en_US |
dc.contributor.author | 周家瑋 | en_US |
dc.date.accessioned | 2016-12-20T05:04:21Z | - |
dc.date.available | 2016-12-20T05:04:21Z | - |
dc.date.issued | 2016-05-01 | en_US |
dc.identifier.govdoc | G01N027/12 | zh_TW |
dc.identifier.uri | http://hdl.handle.net/11536/132273 | - |
dc.description.abstract | 一種多層垂直式感測器包含一基板;一底部電極;以及複數個可穿透電極組結構。底部電極、可穿透電極組結構依序設置於基板上,每一可穿透電極組結構包含:感測層及可穿透電極層。可穿透電極層包含複數個孔洞用以供待測氣體穿入,且一部分可穿透電極層與感測層交疊,介於兩可穿透電極層之間的感測層包含一氣體可穿透結構。利用多層可穿透電極組結構,使待測氣體能夠在各感測層之間自由移動,並與感測層發生反應,並藉由量測反應產生的電性變化達到準確感測目的。上述感測器的製造方法、應用上述感測器的感測系統、感測方法亦於此處被提出。 | zh_TW |
dc.language.iso | zh_TW | en_US |
dc.title | 多層垂直式感測器及其製造方法、以及應用多層垂直式感測器的感測系統、感測方法 | zh_TW |
dc.type | Patents | en_US |
dc.citation.patentcountry | TWN | zh_TW |
dc.citation.patentnumber | 201616127 | zh_TW |
Appears in Collections: | Patents |
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