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dc.contributor.author張翼en_US
dc.contributor.author林岳欽en_US
dc.contributor.author謝廷恩en_US
dc.date.accessioned2016-12-20T05:04:21Z-
dc.date.available2016-12-20T05:04:21Z-
dc.date.issued2016-05-16en_US
dc.identifier.govdocH01L029/778zh_TW
dc.identifier.govdocH01L021/28zh_TW
dc.identifier.urihttp://hdl.handle.net/11536/132275-
dc.description.abstract本發明提供一種高電子遷移率電晶體,以閘極掘入結構搭配高介電常數氧化層以及氮化物介面鈍化層,具有高臨界電壓、高轉導、高穩定之汲極輸出電流以及高可靠度等特性及優點。zh_TW
dc.language.isozh_TWen_US
dc.title高電子遷移率電晶體及其製造方法zh_TW
dc.typePatentsen_US
dc.citation.patentcountryTWNzh_TW
dc.citation.patentnumber201618304zh_TW
Appears in Collections:Patents


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