標題: | Low-Temperature and Ultrafast Synthesis of Patternable Few-Layer Transition Metal Dichacogenides with Controllable Stacking Alignment by a Microwave-Assisted Selenization Process |
作者: | Chen, Yu-Ze Medina, Henry Wang, Sheng-Wen Su, Teng-Yu Li, Jian-Guang Yen, Wen-Chun Cheng, Kai-Yuan Kuo, Hao-Chung Shen, Guozhen Chueh, Yu-Lun 光電工程學系 Department of Photonics |
公開日期: | 23-二月-2016 |
摘要: | To date, the chemical vapor deposition (CVD) process is the most popular approach because of its high yield and quality. Nevertheless, the need for a high temperature and the relatively long process time within each cycle hinder the commercial development in terms of production cost. In this work, we demonstrate a fast (<3 min) and feasible approach to synthesizing a few-layers of WSe2 and MoSe2 on arbitrary substrates by a microwave-assisted selenization process. The transition metal dichalcogenides (TMDs) can be patterned by standard photolithography. Furthermore, controllable layered growth from horizontal to vertical alignment can be achieved, leading to an enhanced chemical catalytic activity caused by large edge sites (exposed areas). As a proof, a highly sensitive NO gas sensor based on vertical WSe2 was fabricated. Moreover, our microwave assisted selenization process can be further extended to achieve other two-dimensional TMD materials because of the simplicity of the process. |
URI: | http://dx.doi.org/10.1021/acs.chemmater.5b04579 http://hdl.handle.net/11536/132586 |
ISSN: | 0897-4756 |
DOI: | 10.1021/acs.chemmater.5b04579 |
期刊: | CHEMISTRY OF MATERIALS |
Volume: | 28 |
Issue: | 4 |
起始頁: | 1147 |
結束頁: | 1154 |
顯示於類別: | 期刊論文 |