標題: An ANN approach for modeling the multisource yield learning process with semiconductor manufacturing as an example
作者: Chen, Toly
工業工程與管理學系
Department of Industrial Engineering and Management
關鍵字: Yield;Learning;Semiconductor;Artificial neural network
公開日期: 一月-2017
摘要: Estimating the future yield of a product is a crucial task for semiconductor manufacturers. However, existing methods cannot differentiate the effects of various sources of yield improvement. To address this concern, this study proposes an innovative approach for modeling the yield learning process of a semiconductor product with artificial neural networks, which enable separating the effects of various sources of yield learning. Two real cases were used to demonstrate the effectiveness of the proposed methodology. (C) 2016 Elsevier Ltd. All rights reserved.
URI: http://dx.doi.org/10.1016/j.cie.2016.11.021
http://hdl.handle.net/11536/133253
ISSN: 0360-8352
DOI: 10.1016/j.cie.2016.11.021
期刊: COMPUTERS & INDUSTRIAL ENGINEERING
Volume: 103
起始頁: 98
結束頁: 104
顯示於類別:期刊論文