標題: An innovative yield learning model considering multiple learning sources and learning source interactions
作者: Chen, Tin-Chih Toly
Lin, Chi-Wei
工業工程與管理學系
Department of Industrial Engineering and Management
關鍵字: Yield;Learning source;Semiconductor;Interaction;Artificial neural network
公開日期: 1-五月-2019
摘要: Existing yield learning models do not separate the effects of different learning sources or consider the interactions among the sources. To address this problem, a multisource-with-interaction yield learning model was developed. In this paper, the properties of this multisource yield learning model are discussed from a theoretical and practical standpoint. In this study, the proposed methodology was applied to the manufacturing process of a dynamic random access memory product. The proposed model exhibited improved accuracy in estimating the future yield, evidencing its superiority over existing yield learning models. The proposed methodology can be generalized to model the learning processes of other performance measures in manufacturing or service systems.
URI: http://dx.doi.org/10.1016/j.cie.2018.07.002
http://hdl.handle.net/11536/152361
ISSN: 0360-8352
DOI: 10.1016/j.cie.2018.07.002
期刊: COMPUTERS & INDUSTRIAL ENGINEERING
Volume: 131
起始頁: 455
結束頁: 463
顯示於類別:期刊論文