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dc.contributor.authorLo, Ming-Chengen_US
dc.contributor.authorFan, Yen-Tingen_US
dc.contributor.authorWu, Chu-Chunen_US
dc.contributor.authorChen, Peng-Yuen_US
dc.contributor.authorLin, Sheng-Dien_US
dc.date.accessioned2017-04-21T06:48:52Z-
dc.date.available2017-04-21T06:48:52Z-
dc.date.issued2016en_US
dc.identifier.isbn978-1-5090-1493-4en_US
dc.identifier.urihttp://hdl.handle.net/11536/134648-
dc.description.abstractWe present the method for large-area growth of single-crystalline Al films in atomic scale on GaAs substrate by using molecular beam epitaxy. The grown Al film of thickness down to 5 nm exhibits smooth surface morphology, a clear and single X-ray diffraction peak in. theta-2 theta scan, and nearly transparent optical response. This work open a window for ex-situ studying quantum size effect in metal film.en_US
dc.language.isoen_USen_US
dc.titleGrowth of atomic-scale aluminum film on GaAs substrateen_US
dc.typeProceedings Paperen_US
dc.identifier.journal2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO)en_US
dc.citation.spage868en_US
dc.citation.epage870en_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.identifier.wosnumberWOS:000391840000247en_US
dc.citation.woscount0en_US
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