Synthesis of Wafer-Scale WSe2 by WOx Selenization on SiO2 / Si Substrates

標題:	Synthesis of Wafer-Scale WSe2 by WOx Selenization on SiO2 / Si Substrates
作者:	Chu, Yung-Ching Jong, Chao-An Ho, Yen-Teng Zhang, Ming Chien, Po-Yen Hsu, Hung-Ru Chen, Hung-Yi Tu, Yung-Yi Pande, Krishna P. Woo, Jason C. S. Chang, Edward Yi 材料科學與工程學系電機工程學系 Department of Materials Science and Engineering Department of Electrical and Computer Engineering
公開日期:	2016
摘要:	Scalable synthesis of thin tungsten diselenide (WSe2) films on 4-inch silicon substrate with 80 nm silicon dioxide (SiO2) is demonstrated. Cross-sectional transmission electron microscopy (TEM) reveals good control of WSe2 layers. Raman spectroscopy confirms high quality crystal of WSe2 is achieved. Back-gated field-effect transistors (FETs) fabricated on these thin films exhibit p-channel characteristics with a good on/off current ratio larger than 1.2 x 10(2).
URI:	http://hdl.handle.net/11536/134674
ISBN:	978-1-5090-0726-4
期刊:	2016 IEEE SILICON NANOELECTRONICS WORKSHOP (SNW)
起始頁:	54
結束頁:	55
Appears in Collections:	Conferences Paper