Fabrication of Optical Waveguide Devices Using Electromagnetic Assisted Nanoimprinting

doi:10.1109/ICSPS.2009.179

Full metadata record

DC Field	Value	Language
dc.contributor.author	Weng, Yung-Jin	en_US
dc.contributor.author	Weng, Yung-Chun	en_US
dc.contributor.author	Wong, Yong-Cheng	en_US
dc.contributor.author	Yang, Sen-Yeu	en_US
dc.contributor.author	Liu, Hsu-Kang	en_US
dc.date.accessioned	2017-04-21T06:49:32Z	-
dc.date.available	2017-04-21T06:49:32Z	-
dc.date.issued	2009	en_US
dc.identifier.isbn	978-0-7695-3654-5	en_US
dc.identifier.uri	http://dx.doi.org/10.1109/ICSPS.2009.179	en_US
dc.identifier.uri	http://hdl.handle.net/11536/135010	-
dc.description.abstract	A creative technology was used in this research. Using the PDMS flexible mold magnetic powder method to transmit imprinting, and by combining the special characteristics of the soft lithography, polymethylmethacrylate (PMMA), and electromagnetic Plate uniform control pressing technology, researching the use of magnetic flexible mold imprinting technology to produce the optical waveguide devices, so as to allow the usage and the technology of micro hot embossing or nanoimprinting more mature.	en_US
dc.language.iso	en_US	en_US
dc.subject	optical waveguide	en_US
dc.subject	magnetic powder	en_US
dc.subject	magnetic-flexible mold	en_US
dc.subject	Electromagnetic control technology	en_US
dc.subject	Nanoimprinting technology	en_US
dc.title	Fabrication of Optical Waveguide Devices Using Electromagnetic Assisted Nanoimprinting	en_US
dc.type	Proceedings Paper	en_US
dc.identifier.doi	10.1109/ICSPS.2009.179	en_US
dc.identifier.journal	PROCEEDINGS OF THE 2009 INTERNATIONAL CONFERENCE ON SIGNAL PROCESSING SYSTEMS	en_US
dc.citation.spage	910	en_US
dc.citation.epage	+	en_US
dc.contributor.department	機械工程學系	zh_TW
dc.contributor.department	Department of Mechanical Engineering	en_US
dc.identifier.wosnumber	WOS:000275782600189	en_US
dc.citation.woscount	1	en_US
Appears in Collections:	Conferences Paper