Nanoindentation-induced phase transformation of silicon

Abstract

In this study, the deformation behavior of single-crystal Si (100) was examined using nanoindentation, followed by analysis using cross-sectional transmission electron microscopy (XTEM), scanning electron microscopy (SEM), and Raman microspectroscopy. XTEM samples were prepared by focused ion beam (FIB) milling to accurately position the cross-section through the indentations. The deformation via phase transformation was clearly observed with micro-Raman and XTEM, showing the presence of high-pressure crystalline phases Si-Ill and Si-XII following pressure release. The indentation fracture toughness of Si is also discussed.