標題: | Fabrication and microstructure of the dc-magnetron-sputtered YBa2Cu3O7-x superconducting thin films |
作者: | Koo, HS Tseng, TY Chang, WR Tu, GC 材料科學與工程學系 電子工程學系及電子研究所 Department of Materials Science and Engineering Department of Electronics Engineering and Institute of Electronics |
公開日期: | 1-四月-1996 |
摘要: | Systematic investigations were conducted to determine the effect of deposition conditions on the microstructure and superconducting properties of YBa2Cu3O7-x thin films produced by d.c. magnetron sputtering on (001) MgO substrate. The films were c-axis preferentially oriented with respect to the (001) MgO surface at substrate temperatures of 680-700 degrees C. X-ray diffraction patterns clearly indicated the existence of the c-axis alignment normal to the substrate surface and some second phases. The second phases, including a Cu-rich phase and Y2O3, were identified by energy dispersive X-ray spectrometer and the microstructures were analysed by electron and;atomic force microscopes. |
URI: | http://hdl.handle.net/11536/1355 |
ISSN: | 0957-4522 |
期刊: | JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS |
Volume: | 7 |
Issue: | 2 |
起始頁: | 67 |
結束頁: | 76 |
顯示於類別: | 期刊論文 |