標題: Fabrication and microstructure of the dc-magnetron-sputtered YBa2Cu3O7-x superconducting thin films
作者: Koo, HS
Tseng, TY
Chang, WR
Tu, GC
材料科學與工程學系
電子工程學系及電子研究所
Department of Materials Science and Engineering
Department of Electronics Engineering and Institute of Electronics
公開日期: 1-四月-1996
摘要: Systematic investigations were conducted to determine the effect of deposition conditions on the microstructure and superconducting properties of YBa2Cu3O7-x thin films produced by d.c. magnetron sputtering on (001) MgO substrate. The films were c-axis preferentially oriented with respect to the (001) MgO surface at substrate temperatures of 680-700 degrees C. X-ray diffraction patterns clearly indicated the existence of the c-axis alignment normal to the substrate surface and some second phases. The second phases, including a Cu-rich phase and Y2O3, were identified by energy dispersive X-ray spectrometer and the microstructures were analysed by electron and;atomic force microscopes.
URI: http://hdl.handle.net/11536/1355
ISSN: 0957-4522
期刊: JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume: 7
Issue: 2
起始頁: 67
結束頁: 76
顯示於類別:期刊論文