Full metadata record
DC FieldValueLanguage
dc.contributor.authorYang, Ping-Fengen_US
dc.contributor.authorWen, Hua-Chiangen_US
dc.contributor.authorJian, Sheng-Ruien_US
dc.contributor.authorLail, Yi-Shaoen_US
dc.contributor.authorWu, Seanen_US
dc.contributor.authorChen, Rong-Shengen_US
dc.date.accessioned2017-04-21T06:49:06Z-
dc.date.available2017-04-21T06:49:06Z-
dc.date.issued2007en_US
dc.identifier.isbn978-1-4244-1636-3en_US
dc.identifier.urihttp://dx.doi.org/10.1109/IMPACT.2007.4433597en_US
dc.identifier.urihttp://hdl.handle.net/11536/135663-
dc.description.abstractWe investigated in this study structural and nanomechanical properties of zinc oxide (ZnO) thin films deposited onto langasite substrates at 200 degrees C through r.f. magnetron sputtering with an r.f. power at 200 W in an O2/Ar gas mixture for different deposition time at 1, 2, and 3 h. Surface morphologies and crystalline structural characteristics were examined using x-ray diffraction (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM). The deposited film featured a polycrystalline nature, with (100), (002), and (101) peaks of hexagonal ZnO at 31.75 degrees, 34.35 degrees, and 36.31 degrees. As the deposition time increased, the ZnO film became predominantly oriented along the c-axis (002) and the surface roughness decreased. Through Berkovich nanoindentation following a continuous stiffness measurement (CSM) technique, the hardness and Young\'s modulus of the ZnO thin films increased as the deposition time increased, with the best results being obtained for the deposition time of 3 h.en_US
dc.language.isoen_USen_US
dc.titleCharacterizations of ZnO thin films deposited onto langasite substrates by r.f. magnetron sputteringen_US
dc.typeProceedings Paperen_US
dc.identifier.doi10.1109/IMPACT.2007.4433597en_US
dc.identifier.journal2007 INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE, PROCEEDINGS OF TECHNICAL PAPERSen_US
dc.citation.spage184en_US
dc.citation.epage+en_US
dc.contributor.department機械工程學系zh_TW
dc.contributor.departmentDepartment of Mechanical Engineeringen_US
dc.identifier.wosnumberWOS:000253090500042en_US
dc.citation.woscount0en_US
Appears in Collections:Conferences Paper