Title: Study on the ESD-Induced Gate-Oxide Breakdown and the Protection Solution in 28nm High-K Metal-Gate CMOS Technology
Authors: Lin, Chun-Yu
Ker, Ming-Dou
Chang, Pin-Hsin
Wang, Wen-Tai
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
Keywords: CMOS;electrostatic discharge (ESD);high-k metal-gate (HKMG);silicon-controlled rectifier (SCR)
Issue Date: 2015
Abstract: To protect the IC chips against the electrostatic discharge (ESD) damages in 28nm high-k metal-gate (HKMG) CMOS technology, the ESD protection consideration was studied in this work. The ESD design window was found to be within 1V and 5.1V in 28nm HKMG CMOS technology. An ESD protection device of PMOS with embedded silicon-controlled rectifier (SCR) was investigated to be suitable for ESD protection in such narrow ESD design window.
URI: http://hdl.handle.net/11536/135820
ISBN: 978-1-4673-9362-1
Journal: 2015 IEEE NANOTECHNOLOGY MATERIALS AND DEVICES CONFERENCE (NMDC)
Appears in Collections:Conferences Paper