標題: LOW-COST TEMPERATURE-COMPENSATED THERMORESISTIVE MICRO CALORIMETRIC FLOW SENSOR BY USING 0.35 mu m CMOS MEMS TECHNOLOGY
作者: Xu, Wei
Gao, Bo
Ma, Shenhui
Zhang, Anping
Chiu, Yi
Lee, Yi-Kuen
交大名義發表
National Chiao Tung University
公開日期: 2016
摘要: In this paper, a low-cost Temperature-compensated Thermoresistive Micro Calorimetric Flow ((TMCF)-M-2) sensor by using a commercial 0.35 mu m 2P4M CMOS MEMS technology is reported. For nitrogen flow, the fabricated (TMCF)-M-2 sensor achieves a normalized sensitivity of 230 mV/(m/s)/mW with respect to the input heating power, which is two orders of magnitude better than the reported micro calorimetric flow sensors. The experimental results of (TMCF)-M-2 sensor under different ambient temperatures T-a of 22 degrees C similar to 48 degrees C showed the excellent temperature insensitive output with the maximum normalized variation of 0.5%. Compared to the uncompensated counterpart (49%), it demonstrates our robust (TMCF)-M-2 sensor design is applicable for the integration of on-chip CMOS electronics for the Internet of Things.
URI: http://hdl.handle.net/11536/136180
ISBN: 978-1-5090-1973-1
ISSN: 1084-6999
期刊: 2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
起始頁: 189
結束頁: 192
Appears in Collections:Conferences Paper