標題: | Rapid displacement sensor based on fitting scan |
作者: | Ye, Zheng-Jie Hwang, Chi-Hung Cheng, Pi-Ying Chen, Chih-Yen Weng, Chun-Jen 機械工程學系 材料科學與工程學系 Department of Mechanical Engineering Department of Materials Science and Engineering |
關鍵字: | confocal;fast scanning;curve fitting |
公開日期: | 2016 |
摘要: | A rapid displacement sensor with a varifocal lens based on a method of fitting scan is proposed for 3D surface profiling. The focal length of the varifocal lens can be adjusted by varying the driving current. By detecting the reflective power of the reflected laser, the displacement can be obtained. By integrating a LabVIEW program based on a Levenberg-Marquardt algorithm in this system, the measuring speed can be substantially improved. Finally, the 3D surface profile of a step-height sample was successfully scanned by this displacement sensor. |
URI: | http://hdl.handle.net/11536/136192 |
ISBN: | 978-1-4673-9220-4 |
期刊: | 2016 IEEE INTERNATIONAL INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE PROCEEDINGS |
起始頁: | 901 |
結束頁: | 906 |
顯示於類別: | 會議論文 |