The CeO2 Sensing Membrane in Electrolyte-Insulator-Semiconductor for Bio-Sensor Applications

標題:	The CeO2 Sensing Membrane in Electrolyte-Insulator-Semiconductor for Bio-Sensor Applications
作者:	Liu, Che Chun Lee, Ming Ling Chang, Kow Ming Chang, Shan Wei Chen, Hsiang Kao, Chyuan Haur Sung, Wei Kung Kuo, Min Hau Chang, Che Wei Chang, Chia Lun Lin, Chun Fu 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
公開日期:	2014
摘要:	In the paper, the EIS structure with high-k CeO2 sensing film has more responsive to H+ relative to Na+ and K+. The CeO2 sensing membrane annealed with O-2 at 800 degrees C shows a higher sensitivity of 58.76 mV/pH, higher linearity, lower hysteresis voltage of 5.97 mV and lower drift rate of 0.96 mV/hr than the other conditions.
URI:	http://hdl.handle.net/11536/136234
ISBN:	978-1-4799-3282-5
期刊:	2014 12TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT)
Appears in Collections:	Conferences Paper