Fabrication of (111) nanotwinned Cu and its applications in interconnects of microelectronic devices

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	Chen, Chih	en_US
dc.contributor.author	Liu, Chien-Min	en_US
dc.contributor.author	Lu, Tien-Lin	en_US
dc.contributor.author	Lin, Han-wen	en_US
dc.contributor.author	Chu, Yi-Cheng	en_US
dc.contributor.author	Lu, Chia-Ling	en_US
dc.contributor.author	Juang, Jing-Ye	en_US
dc.contributor.author	Chen, Kuan-Neng	en_US
dc.contributor.author	Tu, K. N.	en_US
dc.date.accessioned	2017-04-21T06:48:21Z	-
dc.date.available	2017-04-21T06:48:21Z	-
dc.date.issued	2016	en_US
dc.identifier.isbn	978-1-5090-0386-0	en_US
dc.identifier.uri	http://hdl.handle.net/11536/136457	-
dc.language.iso	en_US	en_US
dc.title	Fabrication of (111) nanotwinned Cu and its applications in interconnects of microelectronic devices	en_US
dc.type	Proceedings Paper	en_US
dc.identifier.journal	2016 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE / ADVANCED METALLIZATION CONFERENCE (IITC/AMC)	en_US
dc.citation.spage	27	en_US
dc.citation.epage	27	en_US
dc.contributor.department	材料科學與工程學系	zh_TW
dc.contributor.department	電子工程學系及電子研究所	zh_TW
dc.contributor.department	Department of Materials Science and Engineering	en_US
dc.contributor.department	Department of Electronics Engineering and Institute of Electronics	en_US
dc.identifier.wosnumber	WOS:000387046400010	en_US
dc.citation.woscount	0	en_US
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