標題: X-ray micromachining SU-8 resist for a terahertz photonic filter
作者: Shew, BY
Li, HC
Pan, CL
Ko, CH
機械工程學系
光電工程學系
Department of Mechanical Engineering
Department of Photonics
公開日期: 7-四月-2005
摘要: Deep x-ray lithography (DXL) was used to fabricate two-dimensional photonic crystals (PCs) for a terahertz high-pass filter. Instead of the conventional poly(methyl rnethacrylate) resist, high-sensitivity SU-8 resist was used to pattern the ultra-deep (1 mm), and high aspect ratio (> 30) PC structures. In this study, an x-ray mask with thick Si membrane was used in the DXL process owing to the high-sensitivity nature of SU-8. The robust mask structure can significantly improve the fabrication yield of the conventional x-ray mask with a very thin (< 2 mu m) membrane. Preliminary results demonstrate that SU-8 has poor pattern definition after DXL process, probably due to its high sensitivity. This phenomenon can be eliminated by dissolving oxygen into the resist to 'quench' the excessive photochemical reaction. Thanks to the high adhesion property of SU-8, the sticking problem of the high aspect ratio crystals is easily solved with natural drying by reducing the unbalanced capillary force. After optimizing all the processes. the proposed DXL SU-8 technique successively fabricated the terahertz crystals with high efficiency, high precision 1(< 1 mu m) and high surface quality (R(a) similar to 12 nm). The resist pillars were then deposited with a 300 nm thick gold layer for subsequent terahertz, measurement. The measurement results show that the PC structure acts as a high-pass filter in the terahertz, range. agreeing with the simulation results.
URI: http://dx.doi.org/10.1088/0022-3727/38/7/020
http://hdl.handle.net/11536/13824
ISSN: 0022-3727
DOI: 10.1088/0022-3727/38/7/020
期刊: JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume: 38
Issue: 7
起始頁: 1097
結束頁: 1103
顯示於類別:期刊論文


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