探討乾式電漿蝕刻對晶圓缺陷的影響

Title:	探討乾式電漿蝕刻對晶圓缺陷的影響 Investigation of Defects Induced by Plasma Dry Etch Processes
Authors:	劉嘉群楊界雄光電科技學程
Keywords:	蝕刻;晶圓;電漿;Etch;Wafer;Plasma
Issue Date:	2016
URI:	http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070358307 http://hdl.handle.net/11536/138460
Appears in Collections:	Thesis