對於未知干擾和量測延遲之半導體製程批次控製研究

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	張宸毓	zh_TW
dc.contributor.author	李安謙	zh_TW
dc.contributor.author	Chang, Chen-Yu	en_US
dc.contributor.author	Lee, An-Chen	en_US
dc.date.accessioned	2018-01-24T07:37:33Z	-
dc.date.available	2018-01-24T07:37:33Z	-
dc.date.issued	2016	en_US
dc.identifier.uri	http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070351087	en_US
dc.identifier.uri	http://hdl.handle.net/11536/139158	-
dc.language.iso	zh_TW	en_US
dc.subject	干擾觀測器	zh_TW
dc.subject	史密斯預測器	zh_TW
dc.subject	混合靈敏度	zh_TW
dc.subject	批次控制	zh_TW
dc.subject	未知干擾	zh_TW
dc.subject	量測延遲	zh_TW
dc.subject	Disturbance Observer	en_US
dc.subject	Smith predictor	en_US
dc.subject	H-infinity	en_US
dc.subject	mixed-sensitivity	en_US
dc.subject	Run-to-Run control	en_US
dc.subject	unknown disturbance	en_US
dc.subject	metrology delay	en_US
dc.title	對於未知干擾和量測延遲之半導體製程批次控製研究	zh_TW
dc.title	The Run-to-Run Control of Semiconductor Processes for unknown Disturbance and Metrology Delay	en_US
dc.type	Thesis	en_US
dc.contributor.department	機械工程系所	zh_TW
顯示於類別：	畢業論文