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dc.contributor.author劉鈞榮zh_TW
dc.contributor.author洪浩喬zh_TW
dc.contributor.authorLIU, CHUN-JUNGen_US
dc.contributor.authorHONG, HAO-CHIAOen_US
dc.date.accessioned2018-01-24T07:39:14Z-
dc.date.available2018-01-24T07:39:14Z-
dc.date.issued2017en_US
dc.identifier.urihttp://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070360031en_US
dc.identifier.urihttp://hdl.handle.net/11536/140388-
dc.description.abstract本論文提出設置晶圓上應用於Wafer acceptance test (WAT)之電流量測高動態範圍雙斜率電流輸入類比數位轉換電路。雙斜率電流輸入類比數位轉換電路結合兩種電路技巧,分別為「Current-to-voltage模式」與「Current模式」來達成高動態電流範圍的量測,在電路實現上不需過於複雜的類比、數位電路。 本測試晶片採用0.18-μm 1P6M CMOS製程實現,因電路將放置晶圓的切割道上,所以電路佈局的寬度限制在≦60μm,核心電路面積為0.581*0.057 mm2 (0.033 mm2),符合佈局寬度上的限制。 高動態電流輸入類比數位轉換電路之有效量測範圍690uA-8nA,量測結果得到ADC在Current-to-voltage模式,工作在取樣頻率3.2 kS/s,得到ENOB為9.65-10.09 bits且電路的功耗為4.39 mW;操作在Current模式,工作在取樣頻率30-25 kS/s,得到ENOB為4.08-3.38 bits且電路的功耗為7.10-6.12 mW。zh_TW
dc.description.abstractThe thesis proposes dual slope current input ADC with an on-wafer wide-dynamic range applied in Wafer acceptance test (WAT) in order to measure current of device under test (DUT). The dual slope current input ADC combines two methods (voltage mode, current mode) for enhancing current of measurement capability. And the proposed architecture won’t use complicated analog and digital circuit skills. The test chip was fabricated in a 0.18-μm 1P6M CMOS process. The core area of the proposed circuit is 0.581*0.057 mm2 (0.033 mm2) and width of chip is less than 60μm can be fabricated on scribe line of wafer. The proposed ADC can measure range of current from 690uA to 8nA. Measurement results show ENOB of the proposed ADC is 9.65-10.09 bits under sampling rate of 3.2kS/s and consumes 4.39 mW in voltage mode. And then ENOB is 4.08-3.38 bits under sampling rate of 3kS/s-2.5kS/s and consumes 3.19-7.10 mW in current mode.en_US
dc.language.isozh_TWen_US
dc.subject晶圓接受測試zh_TW
dc.subject電流量測zh_TW
dc.subject雙斜率類比轉換器zh_TW
dc.subject類比轉換器zh_TW
dc.subjectwafer acceptance testen_US
dc.subjectcurrent measurementen_US
dc.subjectDual-slope Analog-to-Digital Converteren_US
dc.subjectAnalog-to-Digital Converteren_US
dc.title設置晶圓上應用於晶圓接受測試之高動態範圍12位元雙斜率電流輸入類比數位轉換電路實現zh_TW
dc.titleImplementation of An On-Wafer Wide-Dynamic 12-bit Dual Slope Current Input ADC for Wafer Acceptance Testsen_US
dc.typeThesisen_US
dc.contributor.department電機工程學系zh_TW
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