使用捕獲氣體熱化學氣相沉積成長氧化鋅微奈米結構在藍寶石和玻璃基板上

Abstract

本研究是採用Zn(C5H7O2)2．xH2O作為前驅物再使用捕獲氣體熱化學氣相沉積成長氧化鋅微奈米結構，實驗分別選用玻璃基板與藍寶石基板(0001)成長氧化鋅，探討不同的成長時間以及基板擺放的位置觀察基板上成長的微奈米之結構的特性。在檢測方面使用FE-SEM、光激發光譜儀(PL)、X光繞射儀(XRD)、穿透光譜等儀器測量基板的特性。電子顯微鏡高倍率的觀察下，大部分的基板能觀察到完整的六角型結構且在固定的位置上能成長出均勻性良好的氧化鋅微奈米結構。X光繞射儀(XRD)的結果顯示，藍寶石基板(0001)主要的成長方向為(002)與(101) ，玻璃基板在(002)方向有很強的方向性。在光激發光譜儀(PL)上，分別使用325nm雷射和254nm lamp激發氧化鋅微奈米結構，發現不同的光源激發會放射出不同的發光特性。在穿透光譜分析，使190~100nm的光源進行穿透率的量測，發現大部分的基板皆在380nm附近都會呈現特殊的曲線。

In this study, Zn(C5H7O2)2．xH2O was used as precursor to grow ZnO micro/nano structure by vapor-trapped thermal CVD . In this experiment, the growth of ZnO was studied by using glass substrate and sapphire substrate (0001), and the characteristics of the structure of the micro/nanometer grown on the substrate were observed with different growth time and the position of the substrate. The characteristics of the substrate were measured using FE-SEM, photo-excitation spectrometer (PL), X-ray diffractometer (XRD), transmission spectroscopy and other instruments. Electron microscopy observation of high magnification, most of the substrate can be observed in a complete hexagonal structure and in a fixed position can grow well uniformity of ZnO micro/nano structure. X-ray diffraction (XRD) results show that the main growth direction of the sapphire (0001) substrate is (002) and (101), and the glass substrates has a strong direction in the (002) direction. Photoluminescence (PL), 325nm laser and 254nm lamp were used to excited the ZnO nanocrystalline structure respectively. It was found that different light source excitation could emit different luminescent properties. In the transmission spectrum analysis, so that the light source of 190 to 100 nm is measured for the transmittance, found that most of the substrate are in the vicinity of 380nm will show a special curve.