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dc.contributor.author陳威儒zh_TW
dc.contributor.author張立zh_TW
dc.contributor.authorChen, Wei-Luen_US
dc.contributor.authorChang, Lien_US
dc.date.accessioned2018-01-24T07:42:02Z-
dc.date.available2018-01-24T07:42:02Z-
dc.date.issued2017en_US
dc.identifier.urihttp://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070451533en_US
dc.identifier.urihttp://hdl.handle.net/11536/142319-
dc.language.isozh_TWen_US
dc.subject磊晶zh_TW
dc.subject氧化鋯zh_TW
dc.subject氮化鋯zh_TW
dc.subject微波電漿氮化zh_TW
dc.subject雙金剛烷zh_TW
dc.subject鑽石zh_TW
dc.subjectepitaxialen_US
dc.subjectZrO2en_US
dc.subjectZrNen_US
dc.subjectMPCVDen_US
dc.subjectnitridationen_US
dc.subjectdiamantaneen_US
dc.subjectdiamonden_US
dc.title矽晶片上氮化ZrO2製備ZrN磊晶薄膜與雙金剛烷輔助鑽石成核於ZrN之研究zh_TW
dc.titleThe study of epitaxial ZrN film on Si substrate by microwave plasma nitridation of ZrO2 and diamantane-assisted diamond nucleation on ZrNen_US
dc.typeThesisen_US
dc.contributor.department材料科學與工程學系所zh_TW
Appears in Collections:Thesis


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