矽晶片上氮化ZrO2製備ZrN磊晶薄膜與雙金剛烷輔助鑽石成核於ZrN之研究

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	陳威儒	zh_TW
dc.contributor.author	張立	zh_TW
dc.contributor.author	Chen, Wei-Lu	en_US
dc.contributor.author	Chang, Li	en_US
dc.date.accessioned	2018-01-24T07:42:02Z	-
dc.date.available	2018-01-24T07:42:02Z	-
dc.date.issued	2017	en_US
dc.identifier.uri	http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070451533	en_US
dc.identifier.uri	http://hdl.handle.net/11536/142319	-
dc.language.iso	zh_TW	en_US
dc.subject	磊晶	zh_TW
dc.subject	氧化鋯	zh_TW
dc.subject	氮化鋯	zh_TW
dc.subject	微波電漿氮化	zh_TW
dc.subject	雙金剛烷	zh_TW
dc.subject	鑽石	zh_TW
dc.subject	epitaxial	en_US
dc.subject	ZrO2	en_US
dc.subject	ZrN	en_US
dc.subject	MPCVD	en_US
dc.subject	nitridation	en_US
dc.subject	diamantane	en_US
dc.subject	diamond	en_US
dc.title	矽晶片上氮化ZrO2製備ZrN磊晶薄膜與雙金剛烷輔助鑽石成核於ZrN之研究	zh_TW
dc.title	The study of epitaxial ZrN film on Si substrate by microwave plasma nitridation of ZrO2 and diamantane-assisted diamond nucleation on ZrN	en_US
dc.type	Thesis	en_US
dc.contributor.department	材料科學與工程學系所	zh_TW
顯示於類別：	畢業論文