完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | 黃成富 | zh_TW |
dc.contributor.author | 蔡春進 | zh_TW |
dc.contributor.author | Huang,Cheng-Fu | en_US |
dc.contributor.author | Tsai,Chuen-Jinn | en_US |
dc.date.accessioned | 2018-01-24T07:42:36Z | - |
dc.date.available | 2018-01-24T07:42:36Z | - |
dc.date.issued | 2017 | en_US |
dc.identifier.uri | http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070061506 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/142709 | - |
dc.language.iso | zh_TW | en_US |
dc.subject | VOCs排放量 | zh_TW |
dc.subject | IPA(異丙醇) | zh_TW |
dc.subject | 濕式清洗製程 | zh_TW |
dc.subject | 火焰離子偵測器(FID) | zh_TW |
dc.subject | VOCs emissions | en_US |
dc.subject | IPA (Isopropyl alcohol) | en_US |
dc.subject | Wet Cleaning Process | en_US |
dc.subject | Flame Ionization Detectors | en_US |
dc.title | 某晶圓廠IPA濕式清洗製程的 VOCs排放減量研究 | zh_TW |
dc.title | The Study of Volatile Organic Solvents (VOCs) Emission Reduction of Semiconductor Manufacturing in IPA Wet Cleaning Process | en_US |
dc.type | Thesis | en_US |
dc.contributor.department | 工學院永續環境科技學程 | zh_TW |
顯示於類別: | 畢業論文 |