某晶圓廠IPA濕式清洗製程的 VOCs排放減量研究

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	黃成富	zh_TW
dc.contributor.author	蔡春進	zh_TW
dc.contributor.author	Huang,Cheng-Fu	en_US
dc.contributor.author	Tsai,Chuen-Jinn	en_US
dc.date.accessioned	2018-01-24T07:42:36Z	-
dc.date.available	2018-01-24T07:42:36Z	-
dc.date.issued	2017	en_US
dc.identifier.uri	http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070061506	en_US
dc.identifier.uri	http://hdl.handle.net/11536/142709	-
dc.language.iso	zh_TW	en_US
dc.subject	VOCs排放量	zh_TW
dc.subject	IPA(異丙醇)	zh_TW
dc.subject	濕式清洗製程	zh_TW
dc.subject	火焰離子偵測器(FID)	zh_TW
dc.subject	VOCs emissions	en_US
dc.subject	IPA (Isopropyl alcohol)	en_US
dc.subject	Wet Cleaning Process	en_US
dc.subject	Flame Ionization Detectors	en_US
dc.title	某晶圓廠IPA濕式清洗製程的 VOCs排放減量研究	zh_TW
dc.title	The Study of Volatile Organic Solvents (VOCs) Emission Reduction of Semiconductor Manufacturing in IPA Wet Cleaning Process	en_US
dc.type	Thesis	en_US
dc.contributor.department	工學院永續環境科技學程	zh_TW
顯示於類別：	畢業論文